Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication
Release time:2023-12-15
Hits:

- Journal:
- Micromachines
- Document Code:
- A110801088
- Volume:
- 13
- Issue:
- 4
- Page Number:
- 524 (14 pp.)
- Translation or Not:
- no
- Date of Publication:
- 2022-01-01
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