Academic Achievements
Spectroscopic characterization of the plasma generated during the deposition of AlxGa1-xN films by pulsed laser co-ablation of Al and GaAs targets in electron cyclotron resonance nitrogen plasma
Dec 13, 2024 |
  • Journal:
     JOURNAL OF PHYSICS D-APPLIED PHYSICS
  • Document Code:
     SY117119
  • Volume:
     48
  • Issue:
     24
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2015