Academic Achievements
Reactive expansion of laser-induced boron/carbon plasma in ECR nitrogen plasma during the deposition of BCN films
Dec 23, 2021 |
  • Journal:
     DIAMOND AND RELATED MATERIALS
  • Document Code:
     SY91398
  • Volume:
     21
  • Page Number:
     66-72
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2012