Academic Achievements
Study on re-sputtering during CNx film deposition through spectroscopic diagnostics of plasma
Apr 21, 2022 |
  • Journal:
     PHYSICS OF PLASMAS
  • Document Code:
     SY114654
  • Volume:
     22
  • Issue:
     10
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2015