Academic Achievements
Layout Decomposition for Hybrid E-Beam and DSA Double Patterning Lithography
Jun 3, 2021 |
  • Journal:
     IEEE Transactions on Circuits and Systems I: Regular Papers
  • Document Code:
     SY128066
  • Volume:
     65
  • Issue:
     6
  • Page Number:
     1954-1967
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2018