Academic Achievements
Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography
Jun 3, 2021 |
  • Journal:
     2017 22ND ASIA AND SOUTH PACIFIC DESIGN AUTOMATION CONFERENCE (ASP-DAC)
  • Document Code:
     SR3792
  • Page Number:
     360-365
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2017