Academic Achievements
Layout decomposition co-optimization for hybrid e-beam and multiple patterning lithography
Jun 7, 2021 |
  • Journal:
     20TH ASIA AND SOUTH PACIFIC DESIGN AUTOMATION CONFERENCE, ASP-DAC 2015
  • Document Code:
     SY123982
  • Page Number:
     652-657
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2015