Academic Achievements
Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography
Dec 9, 2021 |
  • Journal:
     IEICE TRANSACTIONS ON FUNDAMENTALS OF ELECTRONICS COMMUNICATIONS AND COMPUTER SCIENCES
  • Document Code:
     SY150405
  • Volume:
     E92-A
  • Issue:
     7
  • Page Number:
     1652-1659
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2009