Academic Achievements
Layout Decomposition for Hybrid E-Beam and DSA Double Patterning Lithography
Jun 3, 2021 |
  • Journal:
     2017 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS)
  • Document Code:
     SR3390
  • Page Number:
     2461-2464
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2017