Academic Achievements
Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography
Jun 14, 2021 |
  • Journal:
     IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS
  • Document Code:
     SY127996
  • Volume:
     35
  • Issue:
     9
  • Page Number:
     1532-1545
  • Translation or Not:
     no
  • Date of Publication:
     Jan 1, 2016