Characterization of Thermal Stability of Ni(SiGe)/n-SiGe Contact Formed by Isothermal Annealing
- 点击次数：
- 发表刊物：2011 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE AND MATERIALS FOR ADVANCED METALLIZATION (IITC/MAM)
- 编号：SR1389
- 是否译文：否
- 发表时间：2011-01-01
- 发表时间：2011-01-01
