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论文成果

Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography

发布时间:2021-12-09点击次数:
  • 发表刊物: 2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY, ICSICT 2018 - PROCEEDINGS
  • 论文编号: YF1384
  • 页面范围: 21-23
  • 是否译文:
  • 发表时间: 2018-01-01