研究领域
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论文成果
- Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography -2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY, ICSICT 2018 - PROCEEDINGS -2018-01-01
- Combining double patterning with self-assembled block copolymer lamellae to fabricate 10.5 nm full-pitch line/space patterns -Nanotechnology -2019-01-01 -30
- The Solvent Distribution Effect on the Self-Assembly of Symmetric Triblock Copolymers during Solvent Vapor Annealing -Macromolecules -2018-01-01 -51
- Enhanced microphase separation of thin films of low molecular weight block copolymer by the addition of an ionic liquid -Soft Matter -2019-01-01 -15
专利
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著作成果
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科研项目
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