研究领域
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论文成果
- Li Dong-Xue；Chien Chien-Liang；Wei Xinnian；Huang Yanwei；Qu Xin-Ping；Chang Tzu-Hsuan；Xiong Shisheng, Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography -2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY, ICSICT 2018 - PROCEEDINGS -2018-01-01
- Zhou Chun；Dolejsi Moshe；Xiong Shisheng；Ren Jiaxing；Ashley Elizabeth Michiko；Craig Gordon S.W.；Nealey Paul F., Combining double patterning with self-assembled block copolymer lamellae to fabricate 10.5 nm full-pitch line/space patterns -NANOTECHNOLOGY -2019-01-01 -30
- Xiong Shisheng；Li Dongxue；Hur Su-Mi；Craig Gordon S.W.；Arges Christopher G.；Qu Xin-Ping；Nealey Paul F., The Solvent Distribution Effect on the Self-Assembly of Symmetric Triblock Copolymers during Solvent Vapor Annealing -MACROMOLECULES -2018-01-01 -51
- Li Dongxue；Zhou Chun；Xiong Shisheng；Qu Xin-Ping；Craig Gordon S.W.；Nealey Paul F., Enhanced microphase separation of thin films of low molecular weight block copolymer by the addition of an ionic liquid -Soft Matter -2019-01-01 -15
专利
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科研项目
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