研究领域
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论文成果
- Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography .2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY, ICSICT 2018 - PROCEEDINGS .2018 :21-23
- Combining double patterning with self-assembled block copolymer lamellae to fabricate 10.5 nm full-pitch line/space patterns .Nanotechnology .2019 ,30 (45)
- The Solvent Distribution Effect on the Self-Assembly of Symmetric Triblock Copolymers during Solvent Vapor Annealing .Macromolecules .2018 ,51 (18) :7145-7151
- Enhanced microphase separation of thin films of low molecular weight block copolymer by the addition of an ionic liquid .Soft Matter .2019 ,15 (48) :9991-9996
专利
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著作成果
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科研项目
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